7 results
Micromachined Lateral Force Sensors for Characterization of Microscale Surface Forces During Chemical Mechanical Polishing
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1085 / 2008
- Published online by Cambridge University Press:
- 01 February 2011, 1085-T05-11
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- 2008
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Micromachined Shear Stress Sensors for Characterization of Surface Forces During Chemical Mechanical Polishing
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- Journal:
- MRS Online Proceedings Library Archive / Volume 991 / 2007
- Published online by Cambridge University Press:
- 01 February 2011, 0991-C06-03
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- 2007
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Determining Pad-Wafer Contact using Dual Emission Laser Induced Fluorescence
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- Journal:
- MRS Online Proceedings Library Archive / Volume 991 / 2007
- Published online by Cambridge University Press:
- 01 February 2011, 0991-C01-04
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- 2007
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Quantitative In-Situ Measurement of Asperity Compression Under the Wafer During Polishing
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- Journal:
- MRS Online Proceedings Library Archive / Volume 867 / 2005
- Published online by Cambridge University Press:
- 01 February 2011, W5.4
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- 2005
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Instantaneous Fluid Film Imaging in Chemical Mechanical Planarization
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- Journal:
- MRS Online Proceedings Library Archive / Volume 867 / 2005
- Published online by Cambridge University Press:
- 01 February 2011, W2.3
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- 2005
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Correlation of Defects on Dielectric Surfaces with Large Particle Counts in Chemical-Mechanical Planarization (CMP) Slurries Using a New Single Particle Optical Sensing (SPOS) Technique
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- Journal:
- MRS Online Proceedings Library Archive / Volume 867 / 2005
- Published online by Cambridge University Press:
- 01 February 2011, W4.2
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- 2005
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In-Situ Friction and Pad Topography Measurements During CMP
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- Journal:
- MRS Online Proceedings Library Archive / Volume 816 / 2004
- Published online by Cambridge University Press:
- 15 March 2011, K5.4
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- 2004
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